Advanced Energy Announces Alta Digitally Controlled RF Power Delivery Platform for Industrial Plasma Applications
May 02, 2022 8:00 AM
New RF power supplies and tap-selectable matching network provide precise, repeatable control and dynamic response in next-generation plasma processes
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The ALTA power supplies incorporate full digital control and dynamic response to rapid plasma changes to ensure robust and reliable delivery. (Photo: Business Wire)
The ALTA platform includes a 13.56 MHz rack-mounted power supply with power levels from 1.5 kW to 6 kW and a 13.56 MHz tapped digital matching network. The series is optimized for plasma-based industrial processes demanding accurate, reliable and repeatable precision power delivery, including solar panel, flat panel display, precision optics and automotive glass manufacturing.
“As thin-film manufacturing technologies evolve and rapid plasma transitions become the norm, there is a growing demand for power solutions that combine precise RF control with dynamic response to rapid plasma changes,” said Dhaval Dhayatkar, Senior Director of Marketing,
The ALTA power supplies incorporate full digital control and dynamic response to rapid plasma changes to ensure robust and reliable delivery. The ALTA matching network provides tuning versatility with a tapped coil system that can be easily adjusted to accommodate a variety of impedance ranges. Repeatable response minimizes delivered power deviations both between matches and run-to-run under a variety of operating conditions.
By utilizing advanced digital architecture, the ALTA platform enables extremely precise process measurement and control, as well as seamless system integration with state-of-the-art communication interfaces such as EtherCAT and Profinet.
For detailed product information and technical specifications, visit: https://www.advancedenergy.com/products/plasma-power-generators/rf-plasma-generators/alta/
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