Advanced Energy Expands Ascent DC Platform With Advanced Arc Management System
May 01, 2012 7:30 AM Eastern Standard Time
This newest addition to AE's leading DC platform incorporates the company's patented Arc Management System™ technology engineered specifically for arc-sensitive PVD processes, including large-area sputtering in applications such as solar PV and flat panel display manufacturing. Ascent AMS power supplies deliver stable, repeatable power regardless of process material or cathode design. With capability such as the lowest published arc energy—less than 0.4 mJ per kW—customers can minimize and successfully manage arcs in arc-prone environments using materials such as AZO and IGZO. This new product will be available in 30, 40, and 60 kW models.
SVC TechCon Show Highlights
AE experts will be available at the company's booth (#317,
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Paramount® RF power delivery platform, including the new Paramount VHF, featuring a flexible digital architecture, pulsing and pulse synchronization, frequency tuning and a highly developed arc management system;
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Navigator® II digital matching network, incorporating a new, tune-while-pulsing Pure Pulsed Plasma™ capability for highly stable plasma and smooth power delivery. The Navigator II product extends real-time plasma characterization via self-diagnostics and advanced metrology, and enhances accuracy via digital sensor technology; and
- Sekidenko optical fiber thermometers (OFT) delivering high-speed, multi-channel temperature and emissivity measurement and control across multiple processes and substrates.
Technology Forums
In addition to our technology showcase in the exhibition hall, the company is pleased to participate in the following technology forums:
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"Advances in
Power Supplies for High Arc Rate Applications," presented byHendrik Walde , member of AE Thin Films Technical Staff
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"Self-Contained Plasma Source for Remote and Projected Plasma Generation," presented by
Dan Carter , member of AE Thin Films Technical Staff
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"The Pulsed-DC Advantage: Improve Film Quality and Reduce Downtime in Reactive Sputtering Applications," poster session hosted by Doug Pelleymounter, AE Thin Films Field Applications Engineer
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"Next-Generation Arc Management: Precision DC Power Solutions to Manage Arcs for New Materials in Thin-Film PVD Applications," poster session hosted by Skip Larson,
AE Thin Films Director of Product Marketing
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"
Power Supplies , Hardware and Associated Components for Efficient and Stable Plasma Generation," Meet-the-Experts Corner session hosted byDan Carter , member of AE's Thin Films Technical Staff
About Advanced Energy
CONTACT:Source:Cathy Kawakami Director, Corporate CommunicationsAdvanced Energy Industries, Inc. +1. 970.407.6732