Advanced Energy Highlights Enabling Pulsing Technology for 2X/1X Nanometer at SEMICON(R) Korea 2014
Advanced Energy Highlights Enabling Pulsing Technology for 2X/1X Nanometer at SEMICON(R) Korea 2014
Feb 11, 2014 5:00 PM Eastern Standard Time
In addition to the RF pulsing platform, Advanced Energy will display its other dynamic products for semiconductor and thin-film processing applications, including:
- Optical fiber thermometers (OFTs), delivering precise multi-channel wafer temperature monitoring and control
- Remote plasma sources for wafer processing, and point-of-use PFC abatement sources for low COO sustainability
- DC and pulsed DC power supplies for reliable, cost-effective, custom film deposition for ceramic, metal and reactive PVD
At SEMICON Korea, co-located with LED Korea, Advanced Energy will also debut its MXE high-speed pyrometer—enabling accurate, repeatable measurement and control for demanding MOCVD applications. With up to a 10 kHz read rate, the MXE pyrometer is ideal for processes with high susceptor rotation speeds such as HB-LED growth. Precision temperature measurement, combined with 950 nm wavelength reflectance measurements, significantly enhances product yield.
SEMICON Korea takes place at the COEX Exhibition Center in
About Advanced Energy
Advanced Energy is a global leader in reliable power conversion solutions used in thin-film plasma manufacturing processes and solar energy generation. Founded in 1981, Advanced Energy is headquartered in
CONTACT:Source:Bates Marshall Vice President, Sales and MarketingAdvanced Energy Industries, Inc. +1.408.574.2534