Advanced Energy Highlights Precision Power and Control Technologies for Semiconductor and Thin-Film Processing Applications at SEMICON® Korea 2016
Advanced Energy Highlights Precision Power and Control Technologies for Semiconductor and Thin-Film Processing Applications at SEMICON® Korea 2016
Jan 27, 2016 12:59 AM Eastern Standard Time
“Our new high voltage and thermal products are great examples of how AE continues to innovate in every area of our business, expanding our portfolio to suit the evolving needs of our customers,” said
On display, Advanced Energy will showcase its full product portfolio for semiconductor and thin-film processing applications, including:
- RF power with advanced multi-level pulsing, enabling a wide variety of semiconductor applications and providing flexibility and adaptability for 3D, IC, VNAND and next-generation device structures
- Source technology uniquely suited to operate in ultra-clean semiconductor applications, enabling critical plasma-based processes with lower device damage, higher throughput and higher yields
- High voltage modules and systems for e-beam, e-chuck and other semiconductor, analytical and industrial processes that require energy density, flexibility and modularity
- DC power for PVD processes utilized in semiconductor and display manufacturing for copper, aluminum, tantalum, titanium and newer exotic materials
- Thermal products, including pyrometers, optical fiber thermometers and SCR thyristor power controllers, that offer precise thermal profiles and advanced process control solutions for increased productivity, yield and throughput
SEMICON Korea takes place at the COEX Exhibition Center in
About Advanced Energy
CONTACT:Source:Bates Marshall Senior Vice President Global Sales and MarketingAdvanced Energy Industries, Inc. +1.408.574.2534