Advanced Energy® Highlights Precision Power and Control Technologies for Semiconductor and Thin-Film Processing Applications at SEMICON® Korea 2017
Feb 08, 2017 5:00 PM Eastern Standard Time
- RF power with advanced multi-level pulsing, enabling a wide variety of semiconductor applications and providing flexibility and adaptability for 3D logic and memory (VNAND) and next-generation device structures
- Source technology uniquely suited to operate in semiconductor applications, targeted for critical plasma-based processes for lower device damage, higher throughput and higher yields
- High voltage modules and systems for e-beam, e-chuck and ion implantation applications, providing higher power density, flexibility and modularity
- DC power for PVD processes utilized in semiconductor and display manufacturing for copper, aluminum, tantalum, titanium and newer exotic materials
- Thermal products, including pyrometers, optical fiber thermometers and SCR thyristor power controllers, that offer precise thermal profiles and advanced thermal process control solutions for increased productivity and yield
“The advanced technology features in the company’s process power products continue to give OEMs an advantage in semiconductor manufacturing, particularly with the increase in the complexity of deposition and etch processes,” said
Advanced Energy has a global network of offices throughout
SEMICON Korea takes place at the COEX Exhibition Center in
About Advanced Energy
CONTACT:Source:Christina Liebman Director, Corporate MarketingAdvanced Energy Industries, Inc. +1.970.407.6444