Advanced Energy Launches Ascent(R) Dual-Magnetron Sputtering Accessory at SVC TechCon 2013
Advanced Energy Launches Ascent(R) Dual-Magnetron Sputtering Accessory at SVC TechCon 2013
Apr 23, 2013 8:00 AM Eastern Standard Time
The Advanced Energy (AE) Ascent DMS series offers repeatable, tunable film parameters and lowers cost of ownership in large-area glass, solar, flat panel display, AMOLED display and other industrial, dual-magnetron sputtering applications. Designed to deliver 30 to 180 kW of bipolar power—with independent power control to each cathode—Ascent DMS units permit process engineers to customize duty cycle to the wear profile of each target. This enables increased target-erosion uniformity and full utilization of each cathode for longer campaigns. A controllable pulse rise feature offers significant advantages for producing more uniform and higher density films, while unique power-delivery options include selectable frequency, independent power-ratio regulation for each magnetron and power, current or voltage regulation.
Advanced Energy will showcase the Ascent DMS product, along with its power-conversion and control solutions for reactive sputtering, metallic sputtering and cathodic arc deposition at the SVC exhibition. Display products will include:
- AE's recently acquired Solvix line of DC and pulsed-DC power supplies for thin-film sputtering and cathodic arc solutions
- Ascent® AMS and Pinnacle® Plus+ DC power-delivery systems, supporting a wide variety of thin-film coating applications
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Paramount ® RF power-delivery systems with pulsing and pulse synchronization, frequency tuning and a highly developed arc management system - Navio® digital matching networks for industrial applications, leveraging AE's proven matching technology
- Sekidenko OR 400M optical fiber thermometers (OFT), delivering high-speed, multi-channel temperature and emissivity measurement and control across multiple processes and substrates
The SVC TechCon technology exhibition will take place at the
About Advanced Energy
Advanced Energy is a global leader in reliable power conversion solutions used in thin-film plasma manufacturing processes and solar energy generation. Founded in 1981, Advanced Energy is headquartered in
CONTACT:Source:Jim Guilmart Vice President, Sales & MarketingAdvanced Energy Industries, Inc. +1.970.407.6318