Advanced Energy Powers the Future of Thin Films With Innovative Technology at SVC TechCon 2014
Advanced Energy Powers the Future of Thin Films With Innovative Technology at SVC TechCon 2014
May 06, 2014 2:23 PM Eastern Standard Time
The first to introduce regulated pulsing to the market in the early 1990s for newly developed reactive sputtering processes, AE is extending its broad portfolio of pulsing products to enable the next wave of innovation. Its newest DC and RF power conversion systems offer advanced integrated pulsing options—including controlled voltage reversal, standard pulsing, bipolar pulsing, bias pulsing and arc pulsing, as well as synchronized pulsing between bias and arc sources. With AE's controlled, precise, shaped power delivery, process engineers can tailor surface properties while maintaining high deposition rates more efficiently.
Designed to deliver 30 to 180 kW of bipolar power—with independent power control to each cathode—the Ascent® AMS and DMS power conversion products include a dynamic control system, extremely fast arc handling and the lowest stored energy in the industry. Despite the advanced feature set, the Ascent AMS and DMS products offer industry-leading cost of ownership through the customized duty cycle management of power to each target for increased target-erosion uniformity and full utilization of each cathode. The result is longer campaigns and an improved bottom line. Other unique features include selectable frequency and patented boost technology for optimized power delivery to each magnetron.
Advanced Energy will showcase its power conversion products for reactive sputtering, metallic sputtering and cathodic arc deposition at the SVC exhibition. Display units will include:
- Ascent® AMS and DMS, as well as Pinnacle® Plus+ DC power-delivery systems, supporting a wide variety of thin-film coating applications
- Solvix® DC and pulsed-DC power delivery systems for sputtering and cathodic arc deposition
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Paramount ® RF power delivery system with pulsing and pulse synchronization, frequency tuning and a highly developed arc management system - Navio® digital matching network for industrial applications
- Sekidenko OR4000T optical fiber thermometer (OFT) and OR400M optical pyrometer for temperature measurement and control
- Power controller modules (SCRs) for industrial applications requiring precise thermal control
The SVC TechCon exhibition will take place at the
About Advanced Energy
Advanced Energy (Nasdaq:AEIS) is a global leader in innovative power and control technologies for high-growth, precision power conversion solutions. Advanced Energy is headquartered in
CONTACT:Source:Bates Marshall Vice President, Sales and MarketingAdvanced Energy Industries, Inc. +1.408.574.2534