Advanced Energy’s 4100T Optical Fiber Thermometer Improves Temperature Accuracy and Control in Advanced Semiconductor Processes
Nov 23, 2021 8:00 AM Eastern Standard Time
With better measurement accuracy and higher read rate, the 4100T multi-channel, non-contact optical fiber thermometer enables easy upgrade from market-leading OR4000T
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With better measurement accuracy and higher read rate, the 4100T multi-channel, non-contact optical fiber thermometer enables easy upgrade from market-leading OR4000T. (Photo: Business Wire)
“Advanced Energy’s pyrometers are used by top semiconductor OEMs due to our industry-leading performance. The 4100T further extends our leadership with many enhancements beyond our industry-leading OR4000T, enabling our customers to reach unmatched levels of process control and manufacturability,” said
Up to four different temperatures can be measured simultaneously using the 4100T, which reduces the number of control boxes required for multi-point control, shrinks the form factor and delivers cost-saving benefits. The high read rate of up to 1 kHz per channel enables faster thermal response for better temperature control and uniformity of leading-edge applications such as rapid thermal processing, laser annealing, atomic layer deposition and other advanced deposition technologies.
The multi-channel OFT with application-specific, configurable wavelength provides exceptional accuracy, repeatability, reliability and fast read rates for the most demanding temperature measurements. Traditional thermocouple and other contact sensor measurements are undesirable for applications where physical contact with the wafer can cause damage, contamination or measurement errors due to heat transfer effects. The 4100T measures temperature directly with ±1.5°C accuracy in situ without making contact with the object of interest. In addition to eliminating these potential contact measurement issues, the 4100T is also an optimal solution for applications where the wafer is in motion or is being processed at very high temperatures or high ramp rates.
For detailed product information and technical specifications, visit https://www.advancedenergy.com/products/temperature-measurement/thermal-measurement-optical-pyrometers-power-controllers/semiconductorthin-film-pyrometers/sekidenko-4100t/.
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Source: Advanced Energy