Advanced Energy’s New Power Meter Improves Accuracy and Performance in Precision RF Power Applications
Dec 08, 2021 6:00 AM
Integrating power sensor and meter into a single easy-to-use instrument, the new RF power meter simplifies monitoring and enables precise control
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Integrating power sensor and meter into a single easy-to-use instrument, the new RF power meter simplifies monitoring and enables precise control. (Photo: Business Wire)
Combining sensor and meter capability into a single, easy-to-use instrument, the GEMINI 5540A measures at frequencies from 0.2 to 200 MHz and powers from 3 to 5,000 W with 2-sigma accuracy of ±0.5% + 0.5 W. This integrated instrument enables users to replace multiple instruments with a single meter for applications that require precise measurement and control of RF power.
“In demanding semiconductor processes such as high aspect ratio (HAR) plasma etch, precise control and chamber-to-chamber matching of the RF system directly impact process performance,” said
The GEMINI 5540A incorporates a large, easy-to-read OLED digital display that simultaneously shows forward and reverse power, voltage standing wave ratio (VSWR) and frequency. It automatically senses frequency with no reconfiguration required for forward and reverse power measurements. The meter reduces calibration to every 12 months, compared to six months for conventional instruments. It operates with a 5 V, 500 mA input supplied via a standard USB 2.0 port using either an external battery or AC power outlet and off-the-shelf USB adapter.
In addition to taking measurements directly, the meter can also be connected to a PC for collection, storage and audit of data using Advanced Energy’s GEMINI Tools data visualization software.
For detailed product information and technical specifications, visit www.tegam.com/shop/rf-microwave/power-meters/no-product/gemini-5540a-rf-power-meter
The GEMINI 5540A is showcased at AE’s booth 834 at SEMICON West 2021 alongside other solutions for semiconductor manufacturing, including AE’s fast, accurate and reliable match networks. SEMICON West 2021 takes place
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Source: Advanced Energy