Advanced Energy Solid-State Matching Network Selected for Plasma Impedance Matching in <14 nm Semiconductor Etch Applications

May 17, 2017 11:45 AM Eastern Standard Time

Company Reveals Design Win on Major OEM Etch Tool with Navigator® II FastCap(TM)
Solid-State Matching Network

FORT COLLINS, Colo., May 17, 2017 (GLOBE NEWSWIRE) -- Advanced Energy
Industries, Inc. (Nasdaq:AEIS), a global leader in precision power conversion,
announced today that its solid-state matching network has been selected by one
of the world's largest suppliers of semiconductor manufacturing equipment. The
ultra-fast Navigator® II FastCap(TM) solid-state matching network provides
greater capability, productivity and performance, enabling increased
predictability and reproducibility in sub-14 nm plasma processes.

The latest addition to the Navigator II platform, FastCap solid-state technology
enables tuning speeds more than 100X faster than conventional, mechanically
operated, variable vacuum capacitors. When combined with Navigator II digital
instrumentation and controls, the patented, hot-switchable capacitors follow the
fastest process transitions in real time-offering a distinct advantage over
standard vacuum capacitors and resulting in improved run-to-run process

Yuval Wasserman, president and CEO of Advanced Energy, said, "Customer
partnerships in evaluating new technologies are core to our leadership in
precision power. This design win reflects our deep expertise in RF power and a
collaborative effort to understand and respond to unique process challenges and
dynamic plasma characteristics, in order to produce a stable and significant
tune-time advantage. The best-selling Navigator II platform-the industry's first
digital matching network-combined with FastCap solid-state technology is the
answer to the manufacturing of thinner films and finer features in rapid,
complex, multi-step processes."

Advanced Energy leads in RF power conversion with more than 400,000 units
shipped worldwide. The FastCap solution is qualified for use with AE's
Paramount® line of RF power supplies. Currently in volume production, this
product is available for many PECVD and etch bias applications.

About Advanced Energy

Advanced Energy (Nasdaq:AEIS) is a global leader in innovative power and control
technologies for high-growth, precision power solutions for thin films processes
and industrial applications. Advanced Energy is headquartered in Fort Collins,
Colorado, with dedicated support and service locations around the world. For
more information, go to


Christina Liebman
Director, Corporate Marketing
Advanced Energy Industries, Inc.

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Source: Advanced Energy Industries, Inc. via GlobeNewswire


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