FHR Chooses Advanced Energy's Premier DC Process Power Technologies for New Roll-to-Roll Vacuum Coating System
FHR Chooses Advanced Energy's Premier DC Process Power Technologies for New Roll-to-Roll Vacuum Coating System
May 14, 2015 5:29 PM Eastern Standard Time
Ascent® AMS and DMS DC and Bipolar Products Power Innovation, Providing Superior Process Stability and Repeatability in Critical SiO2 PVD Applications
The field-proven Ascent power supplies will provide stable, repeatable process power to deposit metal and oxide layers with outstanding film quality, productivity and yield in the low-e application. This refined power delivery, critical to achieving high-quality, high-rate deposition, derives from AE's wealth of intellectual property, including Arc Management System™ technology, a powerful boost feature, and sophisticated, real-time control of thin-film plasma parameters.
"New developments in power supplies in recent years have significantly contributed to technology and productivity advancements in PVD systems," said
The Ascent DMS series excels at managing arcs—even for critical process materials like SiO2—thanks to its original bipolar design that measures and responds to both voltage and current half wave forms to swiftly extinguish arcs. Independent power control to each cathode allows auto-balancing of the duty cycle to the wear profile of each target, which enables increased target-erosion uniformity and longer campaigns. A controllable pulse rise boost feature offers significant advantages to the vacuum system design, transforming the Ascent DMS unit into a current source and contributing to deposition rates that continue to push conventional boundaries. Exclusive power delivery options—like selectable frequency and independent power-ratio regulation for each magnetron—deliver power stability, process repeatability and transferability in power, current or voltage regulation mode.
"AE has ushered in a new era of precision power conversion for dual-magnetron sputtering," said
About Advanced Energy
Advanced Energy (Nasdaq:AEIS) is a global leader in innovative power and control technologies for high-growth, precision power conversion solutions. Advanced Energy is headquartered in
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CONTACT:Source:Bates Marshall Senior Vice President Global Sales, Marketing and ServiceAdvanced Energy Industries, Inc. +1.408.574.2534